Vacuum Regulator & Vacuum Control Valve | Equilibar Precision Pressure Control

Vacuum Regulators and Vacuum Control Valves

Unique design uses multiple orifices and direct diaphragm sealing for improved accuracy

Like our unique back pressure regulator technology, instead of a single large valve seat the Equilibar vacuum regulator uses multiple orifices sealed by a flexible diaphragm. The Equilibar is dome-loaded by a pilot regulator setting the vacuum setpoint. As flow requirements change, the diaphragm moves a few millimeters to open and close over some or all of the orifices, providing instantaneous and frictionless control. The pilot setpoint pressure may be set with a manual or electronic pilot regulator.

Our vacuum regulators are available in sizes from 1/4″ to 4″ ports. Starting at $600, they offer a good option for complex vacuum applications where conventional solutions have not worked.

Learn more about how Equilibar® vacuum regulators work.

Read about various methods of using a pilot regulator to control the vacuum pressure.

Equilibar EVR is a Direct vacuum regulator 

The Equilibar® vacuum regulator directly controls vacuum pressure by throttling flow between the vacuum supply pump and the process in order to precisely control the process vacuum to a specific setpoint. The EVR is a non-relieving regulator intended for processes where at least a very small gas flow is present at all times.

If your process is gas-tight, an Equilibar application engineer can discuss easy methods of providing a small gas bleed in the process.

Equilibar EVR is NOT a Vacuum Breaker

Equilibar vacuum regulators are not vacuum breakers, which let gas into the system to control pressure.

Learn more about the difference between a vacuum regulator and vacuum breaker.

Download a Brochure

vacuum regulator with atm bleedThe Equilibar® vacuum regulator directly controls vacuum pressure

Schematic of process using vacuum breaker A vacuum breaker lets ambient air into the vacuum system to control the vacuum pressure

Equilibar Vacuum Control Products

image of equilibar high precision vacuum regulator EVR with mechanical pilotHigh Precision Vacuum Regulators
1/4″ to 1″
0 – 30 inHg / 762 mm Hg
image of Equilibar High Flow Vacuum Regulator with mechanical vacuum pilot regulatorHigh Flow Vacuum Valves
1.5″ to 4″
0 – 30 inHg / 762 mm Hg
image of anodized aluminum Equilibar vacuum regulator with QPV1 electronic pressure regulator pilotElectronic
Vacuum Regulators

1/4″ to 1″
0 – 30 in Hg / 762 mm Hg
image of Equilibar BD24 with QPV electronic pressure control pilotLarger Electronic
Vacuum Valves

1.5″ to 4″
0 – 30 in Hg / 762 mm Hg
photo collage of vacuum pilot regulatorVacuum
Pilot Regulators

mechanical, electronic
and remote sensing

Request a Quote


Dramatic Stability Improvement

The Equilibar EVR holds vacuum pressure stable across varying supply pressures. Traditional vacuum regulators are often sensitive to vacuum supply pressure, whereas Equilibar vacuum regulators effectively isolate upstream pressure from varying supply. The chart at right shows the excellent flow stability of the 1″ Equilibar® EVR.

Smooth Computer Automation

Equilibar vacuum regulators respond instantaneously to changes in vacuum supply or setpoint pressure. An electro-pneumatic vacuum pilot regulator can be combined with the EVR for smooth automated computer control.

Temperature and Chemical Compatibility

Equilibar vacuum regulators are available in 316SS, anodized aluminum or PVC, with O-rings and diaphragm materials to meet the needs of the most challenging vacuum environments. Certain designs can withstand process applications with ultrapure and aggressive chemical fumes and moisture. Options are also available for high temperature performance.

graph of Equilibar EVR vacuum stability


This chart shows the projected vacuum performance at various EVR body sizes. If you don’t have a preferred piping size in mind, select the smallest vacuum valve that gives the precision that your application requires in the flow range of the process application.

graph of EVR performance for selecting the right size


To install an Equilibar vacuum regulator, simply connect your vacuum supply pump or to the Outlet port. Connect the process that you want to control to the Inlet port. Ensure there is a small amount of gas bleed into the system. Start the system and adjust vacuum pilot regulator knob to achieve the desired vacuum level.

sketch of installing Equilibar vacuum valve with manual pilot control

Request A Quote Download a Brochure

Vacuum Regulator Video

The video below shows a vacuum regulator with a smaller body size that is designed for vacuum systems with lower maximum flow rates. These small size vacuum regulators exhibit high precision for accurate control. The video shows how the vacuum control valve may be manually adjusted or controlled with an electronic vacuum regulator.

High Flow Vacuum Regulator Video

The link to this video shows how the Equilibar direct diaphragm sealing technology may be scaled up into larger sized vacuum regulators for high flow systems. The BD Series of vacuum regulator shown in the video is available in sizes from 1.5 inch to 4 inch in flange connection or with NPT threads. The HV Series (not shown) vacuum control valves are available in 2, 4, and 6 inch sizes. Click here to go to YouTube and watch the high flow vacuum control valve video

Vacuum Regulator White Papers

Food Packaging White Paper: Food Vacuum White Paper [/two_third]

Equilibar News

verus process equipment for single use

Equilibar and Verus Process Equipment announce partnership with focus on single use valves

Equilibar is pleased to announce a partnership with Verus Process Equipment that will dramatically increase our ability to provide single use fluid control valves to the pharmaceutical and biotech industry in the northeastern region of the United States. Verus was founded by Andy Mutz, who has more than 30 years experience in the design, manufacture Read More

Read More