Vacuum Regulator & Vacuum Control Valves | Equilibar Precision Control

Vacuum Regulators and Vacuum Control Valves

Unique vacuum regulator design for improved accuracy

Like our unique back pressure regulator technology, the Equilibar® vacuum regulator (EVR) uses multiple orifices sealed by a flexible diaphragm instead of a single large valve seat. The Equilibar is dome-loaded by a pilot regulator setting the vacuum setpoint. As flow requirements change, the diaphragm moves a few millimeters to open and close over some or all of the orifices, providing instantaneous and frictionless control. The pilot setpoint pressure may be set with a manual or electronic vacuum pilot regulator.

EVR is available in sizes from 1/4″ to 4″ ports. Starting at $600, they offer a good option for complex vacuum applications where conventional solutions have not worked.

Learn more about how EVR works.

How to choose a vacuum pilot regulator

The pilot vacuum pressure on the dome may be regulated using a manual or an electronic vacuum regulator and may be operated in open loop or closed loop control schemes. The vacuum pilot control choice depends on the application performance requirements. While all of the choices have continuous air ingestion from atmosphere, they vary in intake rate. Read more about various types and specifications of vacuum pilot regulators to control the EVR vacuum pressure.

Equilibar EVR is a Direct vacuum regulator 

The EVR directly controls vacuum pressure by throttling flow between the vacuum supply pump and the process in order to precisely control the process vacuum to a specific setpoint. The EVR is a non-relieving regulator intended for processes where at least a very small gas flow is present at all times.

If your process is gas-tight, an Equilibar application engineer can discuss easy methods of providing a small gas bleed in the process.

Equilibar EVR is NOT a Vacuum Breaker

Equilibar vacuum regulators are not vacuum breakers, which let gas into the system to control pressure.

Note: While the EVR pilot regulator lets in air, similar to a breaker, the amount of air is less than if you were to use a breaker to control
vacuum within the whole system.

Learn more about the difference between a vacuum regulator and vacuum breaker.

Download a Brochure

vacuum regulator with atm bleedThe EVR directly controls vacuum pressure

Schematic of process using vacuum breaker A vacuum breaker lets ambient air into the vacuum system to control the vacuum pressure

Equilibar Vacuum Control Products

image of equilibar high precision vacuum regulator EVR with mechanical pilotHigh Precision Vacuum Regulators
1/4″ to 1″
0 – 30 inHg / 762 mm Hg
image of Equilibar High Flow Vacuum Regulator with mechanical vacuum pilot regulatorHigh Flow Vacuum Valves
1.5″ to 4″
0 – 30 inHg / 762 mm Hg
image of anodized aluminum Equilibar vacuum regulator with QPV1 electronic pressure regulator pilotElectronic
Vacuum Regulators

1/4″ to 1″
0 – 30 in Hg / 762 mm Hg
image of Equilibar BD24 with QPV electronic pressure control pilotLarger Electronic
Vacuum Valves

1.5″ to 4″
0 – 30 in Hg / 762 mm Hg
photo collage of vacuum pilot regulatorVacuum
Pilot Regulators

mechanical, electronic
and remote sensing

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Dramatic Stability Improvement

The Equilibar EVR holds vacuum pressure stable across varying supply pressures. Traditional vacuum regulators are often sensitive to vacuum supply pressure, whereas Equilibar vacuum regulators effectively isolate upstream pressure from varying supply. The chart at right shows the excellent flow stability of the 1″ Equilibar® EVR.

Smooth Computer Automation

Equilibar vacuum regulators respond instantaneously to changes in vacuum supply or setpoint pressure. An electro-pneumatic vacuum pilot regulator can be combined with the EVR for smooth automated computer control.

Temperature and Chemical Compatibility

Equilibar vacuum regulators are available in 316SS, anodized aluminum or PVC, with O-rings and diaphragm materials to meet the needs of the most challenging vacuum environments. Certain designs can withstand process applications with ultrapure and aggressive chemical fumes and moisture. Options are also available for high temperature performance.

graph of Equilibar EVR vacuum stability


The chart at right shows the projected vacuum performance at various EVR body sizes, listed by inlet/outlet port size. To select the optimum size for an application, use the graph to find the smallest regulator that has acceptable vacuum variance in the flow range of the process application.

For example, for flow rates between 5 and 20 standard cubic feet per minute (SCFM), the 3/4″ regulator has about 0.7 inHg drop in vacuum and may be acceptable for some applications. The 1″ regulator, however, has about 0.25 inHg drop in vacuum in that same range. Choose the size that meets your process variation requirements.

If flow rate is unknown, select the Equilibar® vacuum regulator to match existing pipe size or contact an application engineer for assistance in choosing the correct size.

For more details visit the EVR Performance page.

graph of EVR performance for selecting the right size


To install an EVR, simply connect your vacuum supply pump or to the Outlet port. Connect the process that you want to control to the Inlet port. Ensure there is a small amount of gas bleed into the system. Start the system and adjust vacuum pilot regulator knob to achieve the desired vacuum level.

sketch of installing Equilibar vacuum valve with manual pilot control

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Video of Equilibar EVR

Watch how the EVR works and how it may be manually adjusted or electronically controlled.

To view Equilibar high flow vacuum valves in action, follow this link to our YouTube channel.

Applications and Customer Case Studies

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