Back Pressure Regulator for Low Flow

Very Low Flow and Zero Flow Applications

Conventional back pressure regulators often have trouble maintaining target pressure at extremely low flow rates. The Equilibar®’s unique design easily provides flow turndown ratios of 10,000:1 and up to 100,000:1 in many cases.

For pressure control applications requiring flow rates below about 10 ml/minute, Equilibar’s new ZF (Zero Flow) Series takes performance down below the nano liters/minute range. This makes the ZF Series back pressure regulator a true microfluidics pressure regulator.

Equilibar’s new Research Series Back Pressure Regulators are addressing many critical laboratory and microfluidics needs by providing precise control at the lowest flow rates in the industry.


ultra low flow back pressure regulator

Zero-Flow Capable ZF Series BPR
The EB1ZF1 hold stable inlet pressure from true zero flow up through 1000 ml/min. See our Research Series BPR brochure for details.



Ultra wide flow range back pressure regulator with high turn down ratio and low flow performance


Gas Analyzer Application

The EB1 Instrument Series back pressure regulators are ideally suited to addressing critical low flow problems commonly found in gas analyzers. The carrier gases used in gas analyzers typically have a controlled flow rate going in. Because the carrier gas flow is often very low, the back pressure regulator can have difficulty holding a steady pressure. The low flow model back pressure regulators from Equilibar are ideal for this situation. The petrochemical research industry, in particular, is finding many new applications for the products using SS316 bodies and PTFE diaphragms.

Schematic of Gas Analyzer

schematic of gas analyzer

High Pressure / Low Flow

An interesting feature of the Equilibar back pressure regulator is that the low flow performance actually improves with increasing set-point pressures. This is due to the increased seating forces of the diaphragm against the outlet orifices.

Contact Equilibar to for additional assistance with your very low flow back pressure control application.

 back pressure regulator details for low flow applications