Back Pressure Regulators for Chemical Resistance

Suitable for highly aggressive acids and solvents

Equilibar provides a wide range of back presure regulators that are resistant to severe chemicals, including strong acids such as Hydrofluoric acid.

Stainless Steel 316 Construction

Most Equilibar back pressure regulators are made from stainless steel Type 316L for excellent corrosion resistance to most chemicals. These pressure regulators are machined from cold rolled bar-stock, and are frequently in stock for sizes 1/2 and smaller. Learn more about our stainless steel regulators.

Hastelloy and Custom Metal Alloys

Equilibar also offers its smaller regulators in other alloys such as

  • Hastelloy C276
  • Hastelloy C2000
  • Hastelloy C4
  • Titanium
  • Zirconium
  • AL-6XN

Our smaller Research Series products are usually available in Hastelloy C276 directly from stock.

100% PTFE (Teflon®) Construction

Most PTFE fluid controls sacrifice precision for high purity or chemical compatibility. However, the elegance of Equilibar’s diaphragm technology allows for incredible precision even with 100% PTFE construction.

Our 100% PTFE Teflon regulators are sensitive to 0.001 psig and can control down to 0.02 psig.

PTFE bodies with pipe threads can be used for vacuum, ultra low pressure, or back pressure applications up to about 50 psig.

Equilibar has recently introduced new higher pressure ports for 1/8″ and 1/16″ tubing that allows PTFE Teflon regulators to reach 500 psig.

SS316, SS316L, or Hastelloy C276 bodies are available with PTFE diaphragms for applications up to about 2500 psig (depending on the details of the application).


Polymers such as PEEK and PVDF offer chemical resistance to a wide variety of aggressive chemicals, and are significantly stronger than PTFE. These materials make a good alternative where pressures are too high for the softer PTFE. As shown at right, pipe flanges can be welded to the bodies of PVDF regulators.

Tantalum Coating

Tantalum is a rare lustrous metal that is nearly immune to chemical attack, even in the most corrosive environments. For our customers working with extraordinarily harsh chemistries, Equilibar is pleased to offer tantalum-coated regulators, which provide the advantages of tantalum at a fraction of the cost of solid tantalum parts.

Diaphragm Materials

Diaphragms are available from a wide variety of materials, including PTFE, PEEK, Polyimide, Viton, Stainless Steel 316, and Hastelloy. Your application engineer will work with you to determin the optimum material for your pressure, temperature, and chemical application.

Although most Equilibar valves are available without any wetted seals or o-rings, those models incorporating o-rings are typically supplied with Viton, with available upgrade to Kalrez.

Learn more about our chemical resistant options:

Stainless Steel pressure regulatorStainless Steel construction

Stainless steel 316 is the most common material for Equilibar back pressure regulators. Sizes 1/2 and smaller are often available in stock from SS316.

High Pressure PTFE regulator100% PTFE construction

The Equilibar precision back pressure regulator is available with Teflon® body and diaphragm for aggressive chemicals. High pressure ports are available to 500 psig for 1/8″ and 1/16″ tubing.

Hastelloy pressure regulatorHastelloy construction
Equilibar Research Series pressure regulators are available in Hastelloy and other alloys.

GS Series Back Pressure Regulator made from PVDF KynarPVDF Kynar® construction
Pipe flanges can be welded to back pressure regulators made from PVDF.