Precision Vacuum Regulators for Lower Flow Rates

High Resolution and Accuracy for Piping Sizes 1/4" to 1"

Equilibar precision vacuum regulators (EVR) are designed specifically to control a highly stable inlet pressure across widely varying input conditions. These regulators show very little effect due to variation in supply vacuum or changes in flow rate. Equilibar precision vacuum regulators work differently than traditional vacuum control valve designs. The EVR uses a flexible diaphragm as the only moving part. This diaphragm is used to directly seal against the internal valve orifices, eliminating the “stiction” commonly found in traditional vacuum control valves that rely on dynamic O-ring or wiper type seals. The Equilibar design is frictionless and can control vacuum with very high resolution. Learn more about how they work.

Our lower flow precision vacuum regulators are available in sizes ranging from 1/4″ to 1″ with material options of stainless steel 316/316L, anodized aluminum or PVC depending on the application requirements for temperature and chemical resistance. Each EVR is delivered with a manual pilot setpoint regulator for convenient knob adjustment.

 

Precision Vacuum Regulators

1/2″ EVR-GDS4 with Manual Pilot Setpoint Adjuster

Information about lower flow EVR series options is detailed below. Contact an applications engineer for more assistance.

Drawing of a precision vacuum regulator

Metallic Vacuum Regulator Details

Model Inlet / Outlet Port Reference Port Std. Body Materials Diameter (Dim A) Height* (Dim B) Cv Range (Precision) Available End Fittings
(inch) Min Max Std Available
EVR-GSD2 ¼” 1/8″ SS316 (SS) Anodized Aluminum (AA) 3.0 1.3 1E-3 1.2 NPT Vacuum Flange BSPP; SAE
EVR-GSD3 3/8″ 3.5 1.4 1E-3 1.8
EVR-GSD4 ½” 4.5 1.6 1E-3 3.2
EVR-GSD6 ¾” 6.0 2.0 1E-2 5.5
EVR-GSD8 1″ 7.0 2.6 1E-2 8.5
*Height does not include 3″ manual set point regulator.

PVC Vacuum Regulator Details

Model Inlet / Outlet Port Reference Port Std. Body Materials Diameter (Dim A) Height* (Dim B) Cv Range (Precision) Available End Fittings
(inch) Min Max Std Available
EVR-2 ¼” 1/8″ PVC 3.25 1.5 1E-3 1.2 NPT Vacuum Flange BSPP; SAE
EVR-3 3/8″ 3.75 1.6 1E-3 1.8
EVR-4 ½” 4.75 1.8 1E-3 3.2
EVR-6 ¾” 6.25 2.25 1E-2 5.5
EVR-8 1″ 7.25 2.9 1E-2 8.5
*Height does not include 3″ manual set point regulator.

Other Equilibar Vacuum Control Products:

image of equilibar high precision vacuum regulator EVR with mechanical pilotHigh Precision Vacuum Regulators 1/4" to 1" 0 - 30 inHg / 762 mm Hg
image of Equilibar High Flow Vacuum Regulator with mechanical vacuum pilot regulatorHigh Flow Vacuum Valves 1.5" to 4" 0 - 30 inHg / 762 mm Hg
image of anodized aluminum Equilibar vacuum regulator with QPV1 electronic pressure regulator pilotElectronic Vacuum Regulators 1/4" to 1" 0 - 30 in Hg / 762 mm Hg
image of Equilibar BD24 with QPV electronic pressure control pilotLarger Electronic Vacuum Valves 1.5" to 4" 0 - 30 in Hg / 762 mm Hg

Videos about Precision Vacuum Regulators

This video discusses the difference between a vacuum breaker and a direct vacuum regulator, like the Equilibar. It shows how the Equilibar direct vacuum regulator maintains high accuracy even as the system flow rate varies.

Follow this link to watch a video about vacuum control for high flow rates.

Equilibar News

Tony Tang gives presentation at ISA Symposium

Reflections on Singapore's ISA Analysis Division Symposium

In September Equilibar’s engineering manager, Tony Tang, traveled to Singapore to attend the ISA Analysis Division Symposium. The trip was a great opportunity to work with our partners at Practical Analyzer Solutions and to meet several key clients face to face for the first time. Singapore is known for its successful blending of diverse cultures Read More

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