Precision High Flow Vacuum Valves
Equilibar’s precision high flow vacuum regulating valves (EVRs) offer unique performance advantages for pipe sizes up to 4″ in size. EVRs are made in two form factors in this size range – The EVR-IC Industrial Collection and the EVR-BD Series – each with their own benefits. The best choice will depend on the application requirements, which you can discuss with our application engineers.
Contact an EngineerEVRs are designed with Equilibar dome-loaded multiple orifice technology, resulting in precision control across a wide range of flow rates. Equilibar precision EVRs have a flexible diaphragm as a control mechanism that is the only moving part. This diaphragm directly seals against the internal valve orifices, eliminating the “stiction” commonly found in traditional vacuum control valves with dynamic O-ring or wiper type seals. The Equilibar design is frictionless and can control vacuum with extremely high resolution. Learn more about how they work.
Our precision high flow vacuum valves are available in sizes ranging from 1 1/2″ to 4″ with material options of stainless steel 316/316L, anodized aluminum or PVC depending on the application requirements for temperature and chemical resistance. Each EVR is delivered with a manual pilot setpoint regulator for convenient knob adjustment. Electronic pilot regulators can be purchased if automating the EVR is your preference.
- For smaller sizes, see our Precision Vacuum Regulators for Lower Flow Rates.
- For computer automated vacuum regulators, see our Electronic Vacuum Regulators page.
EVR-IC: Industrial Collection Vacuum Valves
We’re excited to announce the launch of the Equilibar EVR-IC series, our latest innovation in regulating valves. These industrial valves provide best-in-class performance in a compact size and are easily customized for a variety of applications.
Key Advantages of the NEW IC Series:
- Short lead times – Standard lead times of 2-3 weeks for in-stock valves
- Premium materials – Standard offering of dual-certified CF3M/1.4409 stainless steel body material with Hastelloy and most nickel-based alloy options available upon request.
- Flexible process connection options – NPT, ANSI RF Flange, and tri-clamps stocked standard. DIN flanges, BSPP threaded ports, and other connections available upon request.
Currently available in 1.5″, 2″ and 3″ ports in CF3M/1.4409 stainless steel
Follow this link to Equilibar YouTube Channel to Learn How IC Series Works for pressure control
Equilibar 2″ EVR-IC16 vacuum regulator with manual pilot setpoint control

Equilibar 4″ EVR-BD32 vacuum regulator with PVC body and manual pilot setpoint control
Product Specification Tables for High Flow Industrial Vacuum Regulators
Contact an applications engineer for assistance.
EVR-IC High Flow Industrial Vacuum Regulator Details – CF3M/1.4409 stainless steel
| Model | Inlet / Outlet Port | Reference Port | Valve Takeout (DIM A) | Height (DIM B) | Cv Range (Precision) | Available End Fittings | |||
|---|---|---|---|---|---|---|---|---|---|
| inch/mm | Min** | Max | Std | Available | |||||
| EVR-IC12 | 1.5″ | 1/4″ | 8.0/203 (NPT); 13.5/343 (150); 13.6/345 (300); 10.8/274 (Tri) | 4.8/122 (NPT); 5.8/147 (150); 6.3/160 (300); 4.8/122 (Tri) | 1.0E-02 | 15 | NPT; ANSI 150 Flange; ANSI 300 Flange; Tri-clamp; | DIN Flange; BSPP | |
| EVR-IC16 | 2″ | 8.0/203 (NPT); 13.6/345 (150); 13.7/347 (300); 10.8/274 (Tri) | 4.8/122 (NPT); 6.3/160 (150); 6.5/165 (300); 4.8/122 (Tri) | 3.0E-02 | 30 | ||||
| EVR-IC24 | 3″ | 1/4″ | 11/279 (NPT); 16.8/427 (150); 14.2/360 (Tri) | 6.6/168 (NPT); 8.2/208 (150); 6.6/168 (Tri) | 6.0E-02 | 60 | |||
| **Min Cv is dependent on diaphragm option. Values indicated are conservative. Contact us for specific details. | |||||||||
Metal BD Body High Flow Vacuum Valve Details
| Model | Inlet / Outlet Port | Reference Port | Body Materials | Diameter (Dim A) | Height* (Dim B) | Cv Range (Precision) | Available End Fittings | ||
|---|---|---|---|---|---|---|---|---|---|
| inch | Min | Max | Std | Available | |||||
| EVR-BD12 | 1.5″ | 1/8″ | SS316 (SS) Anodized Aluminum (AA) | 7.6(SS) 9.5(AA) | 3.7(SS) 3.9(AA) | 1E-2 | 13 | NPT | ANSI Class 150 Flange; SAE; BSPP; |
| EVR-BD16 | 2″ | 11(SS) 9(AA) | 4.1(SS) 4.3(AA) | 3E-228 | 28 | ||||
| EVR-BD24 | 3″ | 1/4″ | 13(SS) 12.5(AA) | 5.3(SS) 5.9(AA) | 6E-1 | 60 | |||
| EVR-BD32 | 4″ | 20 | 8.1 | 1.5E-1 | 160 | ||||
| *Height is measured from top surface of regulator to the center of pipe elbow. Does not include 3″ manual set point regulator. | |||||||||
Polymer BD Body High Flow Vacuum Valve Details
| Model | Inlet / Outlet Port | Reference Port | Body Material | Diameter | Height* | Cv Range (Precision) | Available End Fittings | ||
|---|---|---|---|---|---|---|---|---|---|
| (inch) | Min | Max | Std | Available | |||||
| EVR-BD12 | 1.5″ | 1/8″ | PVC | 9 | 4.3 | 1E-2 | 13 | NPT | BSPP; ANSI Class 150 Flange; SAE |
| EVR-BD16 | 2″ | 11 | 5.1 | 3E-2 | 28 | ||||
| EVR-BD24 | 3″ | 1/4″ | 15 | 8.8 | 6E-1 | 60 | |||
| EVR-BD32 | 4″ | 20 | 9.6 | 1.5E-1 | 160 | ||||
| *Height is measured from top surface of regulator to the center of pipe elbow. Does not include 3″ manual set point regulator. | |||||||||
Other Equilibar Vacuum Control Products:
High Precision Vacuum Regulators
1/4" to 1"
0 - 30 inHg / 762 mm Hg
High Flow Vacuum Valves
1.5" to 4"
0 - 30 inHg / 762 mm Hg
Electronic
Vacuum Regulators
1/4" to 1"
0 - 30 in Hg / 762 mm Hg
Larger Electronic
Vacuum Valves
1.5" to 4"
0 - 30 in Hg / 762 mm Hg
Vacuum
Pilot Regulators
mechanical, electronic
and remote sensing
Videos about Precision Vacuum Regulators
This video shows how the Equilibar vacuum regulator maintains high accuracy and resolution even as the supply vacuum pressure changes and system flow varies from high flow rates to low flow rates.
To learn more about the high speed vacuum control, follow this link.



