How the Equilibar Vacuum Regulator Works

The Equilibar Vacuum Regulator is a unique type of 2-stage vacuum regulator.  It utilizes Equilibar's ultra sensitive dome-loaded back pressure regulator technology to provide unmatched pressure stability across widely varying flow rates.

Stage 1: Small Set-Point Regulator

The first stage consists of a small sensitive vacuum regulator which generates a precise set-point pressure that is equal to the desired process vacuum.  This small regulator is energized by the vacuum supply provided to the outlet port of the larger regulator.

This small regulator also allows a very small amount of air to be drawn into it to allow for reductions in vacuum set-point.

Stage 2: Volume Boosting Regulator

The larger regulator uses Equilibar's unique direct sealing diaphragm technology to closely match the process (inlet) pressure to the pressure provided on its dome (by the small regulator).  This second stages serves as an ultra sensitive volume booster.  It also provides chemical isolation between potentially aggressive process vapors and the smaller set-point regulator.

This volume boosting stage is actually a dome-loaded back pressure regulator.  The special diaphragm blocks the entrance to the process orifices, preventing the vacuum pump from drawing down the process below the set-point pressure (on the dome).  Once the process pressure increases above the set-point pressure, gas lifts up the special diaphragm and flows to the regulator outlet.

For more details on the unique Equilibar dome-loaded back pressure regulator, see overview of the back pressure regulator and How it Works.

Using an Electronic Set-Point Regulator

For computer automation, it is easy to use an electronic vacuum regulator in place of the manual set-point regulator.

Electronic vacuum regulators have two servo valves that quickly open and close to control vacuum measured by a small internal pressure transmitter. They work just like electronic pressure regulators, except that ambient air is used on the inlet valve, and a vacuum supply is connected to the outlet valve.

More information about electronic pressure regulators.

Overall Performance

The combination of these two stages provides a very stable vacuum pressure even as gas flow rates and vacuum supply pressures vary.

It should be noted that this vacuum regulator is a non-relieving non-bleeding type, and is not capable of rapidly increasing the pressure on the inlet port. The regulator is intended for processes where at least a very small gas flow is present at all times.

Engineering Assistance

Contact our engineers to learn more about how to precisely control the vacuum in your process.