The Equilibar® Precision Back Pressure Regulator offers unparalleled performance in the very-low pressure region. The device is capable of matching process gas or liquid pressures to that of a pilot reference signal to within approximately 0.01 psi. The regulator can be used to control back pressure down to approximately 0.02 psi.
This extraordinary precision makes the Equilibar® uniquely qualified for high precision / low-pressure applications in the both laboratory and industrial settings
Both the Equilibar® SC and GS Series back pressure regulators can be configured for very low pressure applications. See Product Details page to select the regulator style, size, and materials that best suit your applications. Inform Equilibar of your desired application pressure range, and your product will be automatically configured with the most appropriate trim.
This chart below demonstrates extremely tight pressure control using a delicate polyethylene diaphragm. Note that flow capacity is limited at the 1 inWC set-point.
To achieve this superior sensitivity, a standard body of the Equilibar is outfitted with a highly sensitive diaphragm suitable for the application. Materials available include PTFE, polyolefin, Buna N, EPDM, and others. Standard bodies come in SS316L, with PTFE and polypropylene also available.
Special Application Focus:
Precision Ultra Low Pressure Gas Supply System
There are very few if any commercial regulators capable of precisely controlling gas pressure below 0.5 psig with varying flow rates.
The LPR2 can be used in conjunction with an Equilibar precision back pressure regulator and a flow control valve to provide incredible precision and responsiveness. By venting any gas flow not required by the application, this system can accommodate forward or reverse gas flow at the application without loss of accuracy.