ultra low flow precision regulator
Ultra low flow EB1LF1
The EB1LF1 controls flow through a 100,000:1 turndown ratio. Pressures from 0.02 psig up to 2000 psig. See our Instrument Series BPR brochure for details.

Very Low Flow Rate Applications


Valve Flow Coefficients down to 1E-7

Conventional back pressure egulators often have trouble maintaining target pressure at extremely low flow rates.  The Equilibar®'s unique design easily provides flow turndown ratios of 10,000:1 and up to 100,000:1 in many cases. 

Equilibar's new Instrument Series Back Pressure Regulators are addressing many critical laboratory needs by providing precise control at the lowest flow rates in the industry. With gas flow rates well below 1 ml/min, the EB1LF1 provides Valve Coefficients (Cv) down to 1E-7!




Ultra low flow performance curve


Gas Analyzer Application

The EB1 Instrument Series back pressure regulators are ideally suited to addressing critical low flow problems commonly found in gas analyzers. The petrochemical research industry, in particular, is finding many new applications for the products using SS316 bodies and PTFE diaphragms.

Ultra low flow performance curve


High Pressure / Low Flow

An interesting feature of the Equilibar back pressure regulator is that the low flow performance actually improves with increasing set-point pressures. This is due to the increased seating forces of the diaphragm against the outlet orifices.

The EB1LF1 performs up to 2000 psig with Cv even lower than those shown above. Coming soon: high pressure performance charts.

Contact Equilibar to for additional assistance with your very low flow application.